Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Pingyan Lei, Mei Chang, Xianmin Tang | 2022-08-30 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Tae Hong Ha, Xuesong Lu, Szuheng Ho, Wei Lei +3 more | 2022-08-23 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, David T. Or +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito +13 more | 2022-06-07 |