Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11430661 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang | 2022-08-30 |
| 11424132 | Methods and apparatus for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho +3 more | 2022-08-23 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Lu Chen | 2022-08-09 |
| 11393665 | Physical vapor deposition (PVD) chamber with reduced arcing | Chao Du, Yong Cao, Chen Gong, Mingdong Li, Fuhong Zhang +1 more | 2022-07-19 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo +2 more | 2022-04-26 |
| 11313034 | Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition | Weimin Zeng, Yong Cao, Daniel Lee Diehl, Huixiong Dai, Khoi A. Phan +2 more | 2022-04-26 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Adolph Miller Allen +1 more | 2022-03-29 |
| 11270911 | Doping of metal barrier layers | Lu Chen, Christina L. Engler, Gang Shen, Feng Chen, Tae Hong Ha | 2022-03-08 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Kishor Kalathiparambil +1 more | 2022-01-11 |