Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Vaibhav Soni, Kishor Kalathiparambil, Vanessa Faune +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani, Philip Allan Kraus +5 more | 2022-03-29 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Fuhong Zhang, Shirish A. PETHE, Lanlan Zhong +1 more | 2022-03-29 |