Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Fuhong Zhang, Gang Shen, Feng Chen, Rui Li +2 more | 2022-12-13 |
| 11443936 | Methods and apparatus for aluminum oxide surface recovery | Carmen Leal Cervantes, Alexander Jansen | 2022-09-13 |
| 11410881 | Impurity removal in doped ALD tantalum nitride | Rui Li, Tae Hong Ha, Xianmin Tang, Lu Chen | 2022-08-09 |
| 11315771 | Methods and apparatus for processing a substrate | Fuhong Zhang, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo, Lanlan Zhong +2 more | 2022-04-26 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Fuhong Zhang, Shirish A. PETHE, Adolph Miller Allen, Lanlan Zhong +1 more | 2022-03-29 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Kishor Kalathiparambil +1 more | 2022-01-11 |