Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527437 | Methods and apparatus for intermixing layer for enhanced metal reflow | Lanlan Zhong, Gang Shen, Feng Chen, Rui Li, Xiangjin Xie +2 more | 2022-12-13 |
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Kishor Kalathiparambil, Martin Lee Riker +1 more | 2022-11-08 |
| 11393665 | Physical vapor deposition (PVD) chamber with reduced arcing | Chao Du, Yong Cao, Chen Gong, Mingdong Li, Rongjun Wang +1 more | 2022-07-19 |
| 11335577 | Methods and apparatus to prevent interference between processing chambers | Sunil Kumar Garg, Paul Kiely, Martin Lee Riker, William Fruchterman, Zheng Wang +1 more | 2022-05-17 |
| 11315771 | Methods and apparatus for processing a substrate | Xiangjin Xie, Shirish A. PETHE, Martin Lee Riker, Lewis Yuan Tse Lo, Lanlan Zhong +2 more | 2022-04-26 |
| 11309169 | Biasable flux optimizer / collimator for PVD sputter chamber | Martin Lee Riker, Anthony Infante, Zheng Wang | 2022-04-19 |
| 11289329 | Methods and apparatus for filling a feature disposed in a substrate | Rui Li, Xiangjin Xie, Shirish A. PETHE, Adolph Miller Allen, Lanlan Zhong +1 more | 2022-03-29 |
| D946638 | Target profile for a physical vapor deposition chamber target | Martin Lee Riker, Zheng Wang | 2022-03-22 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Jothilingam Ramalingam, Kirankumar Neelasandra SAVANDAIAH, William Johanson | 2022-03-08 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Joung Joo Lee, Kishor Kalathiparambil, Xiangjin Xie +1 more | 2022-01-11 |