Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512387 | Methods and apparatus for passivating a target | Xing CHEN, Keith A. Miller, Jothilingam Ramalingam, Jianxin Lei | 2022-11-29 |
| 11393665 | Physical vapor deposition (PVD) chamber with reduced arcing | Yong Cao, Chen Gong, Mingdong Li, Fuhong Zhang, Rongjun Wang +1 more | 2022-07-19 |