Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512387 | Methods and apparatus for passivating a target | Chao Du, Xing CHEN, Keith A. Miller, Jothilingam Ramalingam | 2022-11-29 |
| 11489110 | Methods for treating magnesium oxide film | Xiaodong Wang, Renu Whig, Rongjun Wang | 2022-11-01 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jothilingam Ramalingam, Prashanth Kothnur, William Johanson | 2022-09-20 |
| 11257677 | Methods and devices for subtractive self-alignment | He Ren, Hao Jiang, Mehul Naik, Wenting Hou, Chen Gong +1 more | 2022-02-22 |
| 11227751 | Plasma chamber target for reducing defects in workpiece during dielectric sputtering | Xiaodong Wang, Rongjun Wang | 2022-01-18 |