Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505863 | Methods for forming films on substrates | Alexander Lerner, Roey Shaviv, Satish Radhakrishnan, Xiaozhou Che | 2022-11-22 |
| D969980 | Deposition chamber showerhead | Alexander Lerner, Graeme Scott | 2022-11-15 |
| 11495440 | Plasma density control on substrate edge | Bhaskar Kumar, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2022-11-08 |
| D967351 | Showerhead reflector | Alexander Lerner, Graeme Scott | 2022-10-18 |
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, William Johanson | 2022-09-20 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Roey Shaviv, Phillip Stout, Joseph M. Ranish, Satish Radhakrishnan | 2022-07-19 |