Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515191 | Graded dimple height pattern on heater for lower backside damage and low chucking voltage | Vivek Shah, Ganesh Balasubramanian | 2022-11-29 |
| 11495440 | Plasma density control on substrate edge | Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian +1 more | 2022-11-08 |
| 11488811 | Chucking process and system for substrate processing chambers | Ganesh Balasubramanian, Vivek Shah, Jiheng Zhao | 2022-11-01 |