Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11447857 | Methods and apparatus for reducing tungsten resistivity | Wenting Hou, Jianxin Lei, Jothilingam Ramalingam, Prashanth Kothnur | 2022-09-20 |
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, David Gunther, Prashant Prabhakar Prabhu | 2022-06-14 |
| 11270898 | Apparatus for enhancing flow uniformity in a process chamber | Jothilingam Ramalingam, Kirankumar Neelasandra SAVANDAIAH, Fuhong Zhang | 2022-03-08 |