Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, William Johanson, David Gunther | 2022-06-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361982 | Methods and apparatus for in-situ cleaning of electrostatic chucks | Kirankumar Neelasandra SAVANDAIAH, William Johanson, David Gunther | 2022-06-14 |