Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Elizabeth Neville, Kartik Shah, Vinay Prabhakar, Venkata Sharat Chandra Parimi, Sungwon Ha | 2022-11-29 |
| 11515176 | Thermally controlled lid stack components | Siva Chandrasekar, Rajath Kumar Lakkenahalli Hiriyannaiah, Viren Kalsekar, Vinay Prabhakar | 2022-11-29 |
| 11505863 | Methods for forming films on substrates | Alexander Lerner, Roey Shaviv, Prashanth Kothnur, Xiaozhou Che | 2022-11-22 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Roey Shaviv, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur | 2022-07-19 |