Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Elizabeth Neville, Satish Radhakrishnan, Kartik Shah, Vinay Prabhakar, Sungwon Ha | 2022-11-29 |
| 11495483 | Backside gas leakby for bevel deposition reduction | Diwakar Kedlaya | 2022-11-08 |