Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Zubin Huang, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11495483 | Backside gas leakby for bevel deposition reduction | Venkata Sharat Chandra Parimi | 2022-11-08 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Karthik Janakiraman, Zubin Huang | 2022-09-27 |
| 11443919 | Film formation via pulsed RF plasma | Krishna Nittala, Karthik Janakiraman, Yi Yang, Rui Cheng | 2022-09-13 |
| 11430641 | Processing systems and methods to control process drift | Vivien Chua, Prashant Kumar Kulshreshtha, Zhijun Jiang, Fang Ruan | 2022-08-30 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Zubin Huang, Meenakshi GUPTA +5 more | 2022-04-26 |