| 11532525 |
Controlling concentration profiles for deposited films using machine learning |
Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Diwakar Kedlaya +3 more |
2022-12-20 |
| 11462630 |
Conformal halogen doping in 3D structures using conformal dopant film deposition |
Rui Cheng, Karthik Janakiraman, Abhijit Basu Mallick |
2022-10-04 |
| 11450511 |
Methods and apparatus for zone control of RF bias for stress uniformity |
Lizhong Sun, Jian J. Chen, Chong Ma, Xiaodong Yang |
2022-09-20 |
| 11443919 |
Film formation via pulsed RF plasma |
Krishna Nittala, Diwakar Kedlaya, Karthik Janakiraman, Rui Cheng |
2022-09-13 |
| 11379745 |
Method, apparatus, device and machine-readable medium for detecting abnormal data using an autoencoder |
Jing Ma |
2022-07-05 |
| 11335555 |
Methods for conformal doping of three dimensional structures |
Rui Cheng, Karthik Janakiraman |
2022-05-17 |
