Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Thorsten Kril, Chahal Neema +2 more | 2022-11-01 |
| 11449026 | Variable loop control feature | Venkatanarayana Shankaramurthy, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2022-09-20 |