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Controlling concentration profiles for deposited films using machine learning |
Anton Baryshnikov, Aykut Aydin, Zubin Huang, Yi Yang, Diwakar Kedlaya +3 more |
2022-12-20 |
| 11527408 |
Multiple spacer patterning schemes |
Tzu-shun Yang, Karthik Janakiraman, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more |
2022-12-13 |
| 11515170 |
3D NAND etch |
Shishi Jiang, Pramit Manna, Bo Qi, Abhijit Basu Mallick, Tomohiko Kitajima +2 more |
2022-11-29 |
| 11488856 |
Methods for gapfill in high aspect ratio structures |
Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more |
2022-11-01 |
| 11462630 |
Conformal halogen doping in 3D structures using conformal dopant film deposition |
Yi Yang, Karthik Janakiraman, Abhijit Basu Mallick |
2022-10-04 |
| 11456173 |
Methods for modifying photoresist profiles and tuning critical dimensions |
Meenakshi GUPTA, Srinivas Guggilla, Karthik Janakiraman, Diwakar Kedlaya, Zubin Huang |
2022-09-27 |
| 11443919 |
Film formation via pulsed RF plasma |
Krishna Nittala, Diwakar Kedlaya, Karthik Janakiraman, Yi Yang |
2022-09-13 |
| 11361991 |
Method for Si gap fill by PECVD |
Xin Liu, Fei Wang, Abhijit Basu Mallick, Robert Jan Visser |
2022-06-14 |
| 11335555 |
Methods for conformal doping of three dimensional structures |
Yi Yang, Karthik Janakiraman |
2022-05-17 |
| 11328928 |
Conformal high concentration boron doping of semiconductors |
Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Susmit Singha Roy, Gaurav Thareja +2 more |
2022-05-10 |
| 11315787 |
Multiple spacer patterning schemes |
Tzu-shun Yang, Karthik Janakiraman, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more |
2022-04-26 |
| 11244824 |
Conformal doped amorphous silicon as nucleation layer for metal deposition |
Yihong Chen, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota |
2022-02-08 |
| 11236418 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing |
Abhijit Basu Mallick, Pramit Manna |
2022-02-01 |
