Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462438 | Volumetric expansion of metal-containing films by silicidation | Srinivas Gandikota, Abhijit Basu Mallick, Amrita B. Mullick | 2022-10-04 |
| 11437273 | Self-aligned contact and contact over active gate structures | Yuriy Shusterman, Madhur Sachan, Regina Freed, Sanjay Natarajan | 2022-09-06 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Gabriela Alva, Ho-yung David Hwang, Uday Mitra +4 more | 2022-09-06 |
| 11414751 | Self-aligned structures from sub-oxides | Srinivas Gandikota, Abhijit Basu Mallick | 2022-08-16 |
| 11328928 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Gaurav Thareja +2 more | 2022-05-10 |
| 11315943 | Bottom-up approach to high aspect ratio hole formation in 3D memory structures | Praburam Gopalraja, Abhijit Basu Mallick, Srinivas Gandikota | 2022-04-26 |
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more | 2022-03-29 |
| 11232955 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Yingli Rao, Regina Freed +1 more | 2022-01-25 |