Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289374 | Nucleation-free gap fill ALD process | Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu, Susmit Singha Roy +1 more | 2022-03-29 |
| 11244824 | Conformal doped amorphous silicon as nucleation layer for metal deposition | Rui Cheng, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2022-02-08 |