Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508617 | Method of forming interconnect for semiconductor device | Hao Jiang, Chi-Pin Lu, He Ren, Chi-I Lang, Mehul Naik | 2022-11-22 |
| 11508618 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Qingjun Zhou, Ying Zhang | 2022-11-22 |
| 11437238 | Patterning scheme to improve EUV resist and hard mask selectivity | Nancy Fung, Chi-I Lang | 2022-09-06 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Susmit Singha Roy, Gabriela Alva, Uday Mitra +4 more | 2022-09-06 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2022-05-17 |