Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527414 | Methods for etching structures with oxygen pulsing | Gabriela Alva | 2022-12-13 |
| 11437238 | Patterning scheme to improve EUV resist and hard mask selectivity | Chi-I Lang, Ho-yung David Hwang | 2022-09-06 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian +2 more | 2022-05-17 |