Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469097 | Carbon hard masks for patterning applications and methods related thereto | Yang Yang, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2022-10-11 |
| 11430655 | Low temperature high-quality dielectric films | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2022-08-30 |
| 11332376 | Diamond-like carbon film | Samuel E. Gottheim, Pramit Manna, Abhijit Basu Mallick | 2022-05-17 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Nancy Fung +2 more | 2022-05-17 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Edward Haywood, Samuel E. Gottheim, Pramit Manna, Kien N. Chuc, Adam J. Fischbach +2 more | 2022-03-08 |