Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Pramit Manna, Kien N. Chuc, Adam J. Fischbach +2 more | 2022-03-08 |