| 11515170 |
3D NAND etch |
Shishi Jiang, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2022-11-29 |
| 11515149 |
Deposition of flowable silicon-containing films |
Lakmal C. Kalutarage, Mark Saly, David Thompson, Abhijit Basu Mallick, Tejasvi Ashok |
2022-11-29 |
| 11488856 |
Methods for gapfill in high aspect ratio structures |
Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more |
2022-11-01 |
| 11469097 |
Carbon hard masks for patterning applications and methods related thereto |
Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2022-10-11 |
| 11430655 |
Low temperature high-quality dielectric films |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick |
2022-08-30 |
| 11421324 |
Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition |
Jui-Yuan Hsu, Krishna Nittala, Karthik Janakiraman |
2022-08-23 |
| 11335690 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more |
2022-05-17 |
| 11332376 |
Diamond-like carbon film |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick |
2022-05-17 |
| 11270905 |
Modulating film properties by optimizing plasma coupling materials |
Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Kien N. Chuc, Adam J. Fischbach +2 more |
2022-03-08 |
| 11236418 |
Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing |
Rui Cheng, Abhijit Basu Mallick |
2022-02-01 |
| 11227797 |
Film deposition using enhanced diffusion process |
Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick |
2022-01-18 |
