Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515170 | 3D NAND etch | Shishi Jiang, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more | 2022-11-29 |
| 11515149 | Deposition of flowable silicon-containing films | Lakmal C. Kalutarage, Mark Saly, David Thompson, Abhijit Basu Mallick, Tejasvi Ashok | 2022-11-29 |
| 11488856 | Methods for gapfill in high aspect ratio structures | Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2022-11-01 |
| 11469097 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2022-10-11 |
| 11430655 | Low temperature high-quality dielectric films | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2022-08-30 |
| 11421324 | Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition | Jui-Yuan Hsu, Krishna Nittala, Karthik Janakiraman | 2022-08-23 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2022-05-17 |
| 11332376 | Diamond-like carbon film | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2022-05-17 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Kien N. Chuc, Adam J. Fischbach +2 more | 2022-03-08 |
| 11236418 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Rui Cheng, Abhijit Basu Mallick | 2022-02-01 |
| 11227797 | Film deposition using enhanced diffusion process | Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick | 2022-01-18 |