Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11462630 | Conformal halogen doping in 3D structures using conformal dopant film deposition | Rui Cheng, Yi Yang, Abhijit Basu Mallick | 2022-10-04 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Diwakar Kedlaya, Zubin Huang | 2022-09-27 |
| 11443919 | Film formation via pulsed RF plasma | Krishna Nittala, Diwakar Kedlaya, Yi Yang, Rui Cheng | 2022-09-13 |
| 11421324 | Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition | Jui-Yuan Hsu, Krishna Nittala, Pramit Manna | 2022-08-23 |
| 11335555 | Methods for conformal doping of three dimensional structures | Rui Cheng, Yi Yang | 2022-05-17 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-04-26 |