Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Praket P. Jha | 2022-11-22 |
| 11443919 | Film formation via pulsed RF plasma | Diwakar Kedlaya, Karthik Janakiraman, Yi Yang, Rui Cheng | 2022-09-13 |
| 11421324 | Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition | Jui-Yuan Hsu, Pramit Manna, Karthik Janakiraman | 2022-08-23 |