Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508611 | Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films | Kalyanjit Ghosh, Mayur Govind Kulkarni, Sanjeev Baluja, Krishna Nittala | 2022-11-22 |
| 11469100 | Methods of post treating dielectric films with microwave radiation | Yong Sun, Jingmei Liang, Martin Jay Seamons, Dongqing Li, Shashank Sharma +2 more | 2022-10-11 |
| 11365476 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Bok Hoen Kim, Byung Ho Kil +2 more | 2022-06-21 |
| 11367614 | Surface roughness for flowable CVD film | Jinrui GUO, Jingmei Liang, Li Zhang | 2022-06-21 |