Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11365476 | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices | Praket P. Jha, Allen Ko, Xinhai Han, Thomas Jongwan Kwon, Byung Ho Kil +2 more | 2022-06-21 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |