Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495454 | Deposition of low-stress boron-containing layers | Huiyuan Wang, Rick Kustra, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli | 2022-11-08 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Adib Khan, Shankar Venkataraman, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2022-08-09 |
| 11404263 | Deposition of low-stress carbon-containing layers | Huiyuan Wang, Rick Kustra, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli | 2022-08-02 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2022-03-15 |