Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527421 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Ellie Yieh | 2022-12-13 |
| 11408075 | Batch curing chamber with gas distribution and individual pumping | Shankar Venkataraman, Jay D. Pinson, II, Jang-Gyoo Yang, Nitin K. Ingle, Qiwei Liang | 2022-08-09 |
| 11361978 | Gas delivery module | Qiwei Liang, Sultan Malik, Srinivas D. Nemani | 2022-06-14 |
| D941787 | Substrate transfer blade | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2022-01-25 |