Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527421 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Srinivas D. Nemani, Sean S. Kang, Adib Khan | 2022-12-13 |
| 11429026 | Lithography process window enhancement for photoresist patterning | Huixiong Dai, Mangesh Ashok BANGAR, Srinivas D. Nemani, Christopher S. Ngai | 2022-08-30 |
| 11410860 | Process chamber for etching low k and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Sergey G. Belostotskiy | 2022-08-09 |
| 11387071 | Multi-source ion beam etch system | Qiwei Liang, Srinivas D. Nemani, Douglas A. Buchberger, Jr., Chentsau Chris Ying | 2022-07-12 |
| 11302549 | Substrate vacuum transport and storage apparatus | Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula | 2022-04-12 |
| 11289331 | Methods for graphene formation using microwave surface-wave plasma on dielectric materials | Jie Zhou, Erica Chen, Qiwei Liang, Chentsau Chris Ying, Srinivas D. Nemani | 2022-03-29 |
| 11264460 | Vertical transistor fabrication for memory applications | Arvind Kumar, Sanjeev Manhas, Mahendra Pakala | 2022-03-01 |