| 11527421 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Sean S. Kang, Adib Khan, Ellie Yieh |
2022-12-13 |
| 11446740 |
Multiple sequential linear powder dispensers for additive manufacturing |
Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Thomas Brezoczky +5 more |
2022-09-20 |
| 11429026 |
Lithography process window enhancement for photoresist patterning |
Huixiong Dai, Mangesh Ashok BANGAR, Christopher S. Ngai, Ellie Yieh |
2022-08-30 |
| 11410860 |
Process chamber for etching low k and other dielectric films |
Dmitry Lubomirsky, Ellie Yieh, Sergey G. Belostotskiy |
2022-08-09 |
| 11387071 |
Multi-source ion beam etch system |
Qiwei Liang, Ellie Yieh, Douglas A. Buchberger, Jr., Chentsau Chris Ying |
2022-07-12 |
| 11361978 |
Gas delivery module |
Adib Khan, Qiwei Liang, Sultan Malik |
2022-06-14 |
| 11302549 |
Substrate vacuum transport and storage apparatus |
Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Arvind Sundarrajan, Avinash Avula, Ellie Yieh |
2022-04-12 |
| 11302519 |
Method of patterning a low-k dielectric film |
Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky, Sergey G. Belostotskiy |
2022-04-12 |
| 11289331 |
Methods for graphene formation using microwave surface-wave plasma on dielectric materials |
Jie Zhou, Erica Chen, Qiwei Liang, Chentsau Chris Ying, Ellie Yieh |
2022-03-29 |
| 11244808 |
Monopole antenna array source for semiconductor process equipment |
Qiwei Liang |
2022-02-08 |
| D941787 |
Substrate transfer blade |
Sultan Malik, Adib Khan, Qiwei Liang |
2022-01-25 |
| 11222769 |
Monopole antenna array source with gas supply or grid filter for semiconductor process equipment |
Qiwei Liang |
2022-01-11 |
