Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508618 | Multicolor self-aligned contact selective etch | Yung-Chen Lin, Ying Zhang, Ho-yung David Hwang | 2022-11-22 |
| 11302519 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Dmitry Lubomirsky, Sergey G. Belostotskiy | 2022-04-12 |