Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387071 | Multi-source ion beam etch system | Qiwei Liang, Srinivas D. Nemani, Ellie Yieh, Chentsau Chris Ying | 2022-07-12 |
| 11315760 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2022-04-26 |