Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486927 | Bode fingerprinting for characterizations and failure detections in processing chamber | Tao Zhang, Upendra Ummethala | 2022-11-01 |
| 11315760 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2022-04-26 |