Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499223 | Continuous liner for use in a processing chamber | Kenneth S. Collins, Kartik Ramaswamy | 2022-11-15 |
| 11424104 | Plasma reactor with electrode filaments extending from ceiling | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy | 2022-08-23 |
| 11355321 | Plasma reactor with electrode assembly for moving substrate | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy | 2022-06-07 |
| 11315760 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2022-04-26 |