Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499223 | Continuous liner for use in a processing chamber | James D. Carducci, Kartik Ramaswamy | 2022-11-15 |
| 11424104 | Plasma reactor with electrode filaments extending from ceiling | Michael R. Rice, Kartik Ramaswamy, James D. Carducci | 2022-08-23 |
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu | 2022-06-28 |
| 11355321 | Plasma reactor with electrode assembly for moving substrate | Michael R. Rice, Kartik Ramaswamy, James D. Carducci | 2022-06-07 |
| 11315760 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2022-04-26 |