Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Jie Yuan, Li Xu, Kenneth S. Collins | 2022-06-28 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2022-04-12 |
| 11279661 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Biraja P. Kanungo, Dmitry Lubomirsky | 2022-03-22 |
| 11270870 | Processing equipment component plating | Juan Carlos Rocha-Alvarez, Bushra Afzal | 2022-03-08 |
| 11264261 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Senh Thach | 2022-03-01 |