Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515150 | Hardmask tuning by electrode adjustment | Michael Wenyoung Tsiang, Li-Qun Xia, Kevin Hsiao, Liangfa Hu, Yayun Cheng | 2022-11-29 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Ren-Guan Duan, Amit Kumar BANSAL, Jianhua Zhou, Juan Carlos Rocha-Alvarez | 2022-04-12 |