Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515150 | Hardmask tuning by electrode adjustment | Michael Wenyoung Tsiang, Abdul Aziz Khaja, Kevin Hsiao, Liangfa Hu, Yayun Cheng | 2022-11-29 |
| 11370669 | Amorphous silicon doped yttrium oxide films and methods of formation | Tatsuya Sato, Sean M. Seutter | 2022-06-28 |
| 11367594 | Multizone flow gasbox for processing chamber | Mingle Tong, Daemian Raj | 2022-06-21 |