Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367594 | Multizone flow gasbox for processing chamber | Mingle Tong, Li-Qun Xia | 2022-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367594 | Multizone flow gasbox for processing chamber | Mingle Tong, Li-Qun Xia | 2022-06-21 |