Issued Patents 2022
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532463 | Semiconductor processing chamber and methods for cleaning the same | Vishwas Kumar Pandey, Vinay Prabhakar, Bushra Afzal, Badri Narayan Ramamurthi | 2022-12-20 |
| 11530482 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more | 2022-12-20 |
| 11501993 | Semiconductor substrate supports with improved high temperature chucking | Jian Li, Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Xinhai Han +3 more | 2022-11-15 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi | 2022-11-08 |
| 11456197 | Systems and methods for providing maintenance access to electronic device manufacturing tools | Michael R. Rice, Jeffrey C. Hudgens | 2022-09-27 |
| 11434568 | Heated ceramic faceplate | David H. Quach | 2022-09-06 |
| 11339475 | Film stack overlay improvement | Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more | 2022-05-24 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Amit Kumar BANSAL, Jianhua Zhou | 2022-04-12 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2022-04-05 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |
| 11270870 | Processing equipment component plating | Ren-Guan Duan, Bushra Afzal | 2022-03-08 |