Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530482 | Faceplate having a curved surface | Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez +5 more | 2022-12-20 |
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11501993 | Semiconductor substrate supports with improved high temperature chucking | Jian Li, Juan Carlos Rocha-Alvarez, Zheng John Ye, Daemian Raj Benjamin Raj, Xinhai Han +3 more | 2022-11-15 |
| 11339475 | Film stack overlay improvement | Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more | 2022-05-24 |