Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice | 2022-10-25 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11430686 | Pedestal heater for spatial multi-wafer processing tool | Sanjeev Baluja, Dhritiman Subha Kashyap | 2022-08-30 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Arkaprava Dan, Sanjeev Baluja, Wei V. Tang | 2022-03-01 |