Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476135 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller, Luke Bonecutter | 2022-10-18 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, Tejas Ulavi, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11404297 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, Paul B. Reuter | 2022-08-02 |
| 11388810 | System, apparatus and method for multi-frequency resonator operation in linear accelerator | Peter F. Kurunczi, Frank Sinclair | 2022-07-12 |
| 11355367 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, Luke Bonecutter, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-06-07 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |