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Robot for simultaneous substrate transfer |
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| 11388810 |
System, apparatus and method for multi-frequency resonator operation in linear accelerator |
Peter F. Kurunczi, Frank Sinclair |
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| 11355367 |
Robot for simultaneous substrate transfer |
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| 11315806 |
Batch heating and cooling chamber or loadlock |
Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, William T. Weaver |
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| 11264258 |
Buffer chamber wafer heating mechanism and supporting robots |
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2022-03-01 |
