Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476135 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller, David Blahnik | 2022-10-18 |
| 11443973 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-09-13 |
| 11404297 | Systems, apparatus, and methods for an improved load port | David Blahnik, Paul B. Reuter | 2022-08-02 |
| 11355367 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, David Blahnik, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-06-07 |
| 11326256 | Dome stress isolating layer | Yunzhe Yang, Rupankar Choudhury, Abhijit A. Kangude | 2022-05-10 |
| 11227746 | Isolated backside helium delivery system | Abhijit A. Kangude | 2022-01-18 |