Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril +2 more | 2022-11-01 |
| 11326256 | Dome stress isolating layer | Luke Bonecutter, Yunzhe Yang, Rupankar Choudhury | 2022-05-10 |
| 11227746 | Isolated backside helium delivery system | Luke Bonecutter | 2022-01-18 |