Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Rui Cheng, Yi Yang +3 more | 2022-12-20 |
| 11487304 | Process fluid path switching in recipe operations | Mitesh Sanghvi, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema +2 more | 2022-11-01 |
| 11449026 | Variable loop control feature | Anton Baryshnikov, Brett Berens, Mitesh Sanghvi, Shuang Liu | 2022-09-20 |