Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Rui Cheng, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Rui Cheng, Srinivas Guggilla, Karthik Janakiraman, Diwakar Kedlaya | 2022-09-27 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-04-26 |