Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11540432 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2022-12-27 |
| 11443973 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Charles T. Carlson, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-09-13 |
| 11413744 | Multi-turn drive assembly and systems and methods of use thereof | Jeff Hudgens, Damon K. Cox | 2022-08-16 |
| 11358809 | Vacuum robot apparatus for variable pitch access | Jeffrey C. Hudgens, Karuppasamy Muthukamatchi | 2022-06-14 |